Nanofabrication platform

GINYS-ICN2-003

Edifici ICN2.
Campus de la UAB
08193 Bellaterra
Espanya

The ICN2 Nanofabrication Facility focuses on the design and development of nanofabrication methods and techniques for basic and applied research in nanoscience and nanotechnology. It provides researchers and students an extensive range of processing services to help them carry out their research activities. It also offers support, assistance and training to allow the researchers and other users to safely and efficiently operate the equipment available. The facility is designed to support the fabrication and characterisation of nanoscale materials and structures, and the integration of devices at all length scales. The facility’s mission is to provide high quality services to both internal and external users.
MISSION AND VISION
The Nanofabrication Facility is a cross-groups, general user facility, designed to support the ICN2 research effort. The facility is open to all trained personnel on a recharge basis, including ICN2 as well as external personnel. It is our mission to provide a state-of-the art facility for advanced device fabrication at the micro- and nano-scale. In addition to providing essential micro and nanofabrication capabilities for mainstream research on electronic, optoelectronic and 2D materials and devices, this facility is intended to facilitate the pursuit of research in emerging, interdisciplinary, and rapidly growing fields such as biomedical and biochemical lab-on-a-chip devices, heterogeneous integrated circuits, photonics and phononic devices and nanoscale science and technology. The Nanofabrication Facility aims to deliver outcomes that will have real impact for users, by ensuring that it is easy to access, agile in how it applies engineering expertise to respond quickly and accurately, and always seeking opportunities to enhance the quality of services that are available.

Services

See some examples

  • Molecular Factory
  • Dynamic surfaces
  • Antibacterial surfaces
  • Conductive electrodes for OPV
  • Light manipulation
  • Dimensional nanometrology
  • Graphene device technology for in vitro experiments
  • Flexible graphene devices for in vivo preclinical evaluation
  • Neural Implants
  • Metamaterials
  • Spintronics

Equipment

The Nanofabrication Facility Lab is a 100m2 cleanroom type laboratory that offers equipment for the fabrication and characterization of micro- and nanodevices and structures. It is a specially designed and constructed room in which the air supply, air distribution, air filtration, materials of construction and operating procedures are regulated to control airbone particle concentrations to meet appropiate cleanliness levels. Our facility is classified as ISO Class 6 and 7 which means that there are at most 1,000 or 10,000 particles ≥ 0.5 µm per ft3, respectively

The Facility is segmented in three dedicated rooms: ISO 6 room for Lithography processes and two ISO 7 rooms for etching and deposition processes.

EQUIPMENTS

Nanofabrication Facility provides a comprehensive user experience, housing instrumentation for many nanofabrication processes under the one roof. This allows users to take projects from concept through to prototype with ease. Key service areas include :

Staff

Raúl Pérez Rodríguez | raul.perez@icn2.cat | 937 373 645 | ORCID | PRC Page

INSTITUTE

ICN2 - Institut Català de Nanociència i Nanotecnologia

Edifici ICN2
UAB Campus Bellaterra

08193 Cerdanyola del Vallès (Bellaterra) http://www.icn2.cat/en/

DOMAINS RIS3CAT

  • Sistema d'energia i recursos
  • Education and knowledge generation system
  • Industrial system

CATEGORIES

  • TECHNOLOGICAL EQUIPMENT
    • Energy Laboratory
    • Industry 4.0
    • Instrumentation
    • Materials Laboratory
    • Medical Devices
    • Other specializated laboratories

RATES AND ACCESS

Availability Level: Medium
Access Procedures:

Open . Reception is staffed between 9am and 5pm, Monday to Friday

Conditions

QUALITY CONTROL

Clean Room ISO 14644 – ISO 6 – US FED STD 209E Class 1000
Clean rooms are classified according to the number and size of particles allowed per volume of air. Class figures denote the number of particles the size of 0.5 μm or more allowed per cubic foot of air.
Status: Active
Clean Room ISO 14644 – ISO 7 – US FED STD 209E Class 10000
Clean rooms are classified according to the number and size of particles allowed per volume of air. Class figures denote the number of particles the size of 0.5 μm or more allowed per cubic foot of air.
Status: Active

FACILITIES NETWORKS

NANOLITO SPAIN – Spanish Nanolithography Network
Nanolito is the Spanish Nanolithography Network. Nanolithography encompasses the set of lithographic techniques that make it possible to manufacture nanodevices and therefore represents a key element in Nanotechnology.
Reach: Spain
Status: Active
CERCA - Ginys