Nanofabrication platform
Edifici ICN2.
Campus de la UAB
08193 Bellaterra
Espanya
MISSION AND VISION
The Nanofabrication Facility is a cross-groups, general user facility, designed to support the ICN2 research effort. The facility is open to all trained personnel on a recharge basis, including ICN2 as well as external personnel. It is our mission to provide a state-of-the art facility for advanced device fabrication at the micro- and nano-scale. In addition to providing essential micro and nanofabrication capabilities for mainstream research on electronic, optoelectronic and 2D materials and devices, this facility is intended to facilitate the pursuit of research in emerging, interdisciplinary, and rapidly growing fields such as biomedical and biochemical lab-on-a-chip devices, heterogeneous integrated circuits, photonics and phononic devices and nanoscale science and technology. The Nanofabrication Facility aims to deliver outcomes that will have real impact for users, by ensuring that it is easy to access, agile in how it applies engineering expertise to respond quickly and accurately, and always seeking opportunities to enhance the quality of services that are available.Services
- Molecular Factory
- Dynamic surfaces
- Antibacterial surfaces
- Conductive electrodes for OPV
- Light manipulation
- Dimensional nanometrology
- Graphene device technology for in vitro experiments
- Flexible graphene devices for in vivo preclinical evaluation
- Neural Implants
- Metamaterials
- Spintronics
Equipment
The Nanofabrication Facility Lab is a 100m2 cleanroom type laboratory that offers equipment for the fabrication and characterization of micro- and nanodevices and structures. It is a specially designed and constructed room in which the air supply, air distribution, air filtration, materials of construction and operating procedures are regulated to control airbone particle concentrations to meet appropiate cleanliness levels. Our facility is classified as ISO Class 6 and 7 which means that there are at most 1,000 or 10,000 particles ≥ 0.5 µm per ft3, respectively
The Facility is segmented in three dedicated rooms: ISO 6 room for Lithography processes and two ISO 7 rooms for etching and deposition processes.
EQUIPMENTS
Nanofabrication Facility provides a comprehensive user experience, housing instrumentation for many nanofabrication processes under the one roof. This allows users to take projects from concept through to prototype with ease. Key service areas include :
- Etching