NFL - Nano Fabrication Lab
GINYS-ICFO-006
The NanoFabrication Lab (NFL) at ICFO is a transversal facility devoted to the fabrication and characterization of nanostructured photonic devices.
The laboratory premises, comprising a 200 m2 ISO6/ISO7 cleanroom and other controlled environment spaces, include a complete set of state of the art nanofabrication tools and techniques for a wide range of optical applications, from biosensing to optical communications, and spanning a broad range of materials, such as polymers, semiconductors, metals or crystals. The laboratory also includes tools for advanced materials and device characterization.
Services
Available techniques
Thin film deposition
• Thermal and e-beam evaporation
• Sputtering
• Atomic Layer Deposition (ALD)
Imaging
• Scanning Electron Microscopy (SEM)
Dry etching
• Reactive Ion Etching (RIE)
Surface topography
• Atomic Force Microscopy (AFM)
• Profilometry
Lithography
• E-beam lithography (EBL)
• Optical lithography (Maskless aligner)
Analysis and metrology
• Spectroscopic ellipsometry
Nanomachining and nanoanalytics
• Focused Ion Beam (FIB)
Surface activation and cleaning
• Plasma ashing/cleaning
• Ozone cleaning
Equipment
- Lesker LAB18
- Oxford Instruments Plasmalab System 100 ICP 180
- Heidelberg Maskless Aligner MLA150
- CRESTEC CABL-9510C
- Zeiss Auriga CrossBeam
- Zeiss Orion NanoFab
- Park NX10 / Park NX20
Staff
Paula Díaz Carreras | Paula.Diaz@icfo.eu
| +34 935534030
Francisco Javier Pérez Díaz | javier.perez@icfo.eu
| +34 935534030
Prof. Dr. Niek van Hulst | niek.vanhulst@icfo.eu
| +34 935534036 | ORCID
Dr. Johann Osmond | johann.osmond@icfo.eu
| +34 935534030 | ORCID
