MicrofabSpace
GINYS-IBEC-001
Dra. Maria Teresa Galán Cascales
Microfab and Microscopy Characterization Facilities Coordinator
The MicroFabSpace is one of the most experienced services in the IBEC’s Core Facilities, with a clean room (10.000 class) research space specialized in the fabrication and characterization of micro-devices and micro-structures.
Extensively equipped with instruments aimed at the development of devices required in bioengineering, the MicroFabSpace gathers a large catalogue of specific techniques and protocols and has a specialized technical staff, which provides assistance in advanced research, including design, development and analysis of fabricated devices.
We offer the tools with which our users can put their innovative ideas into practice, but also the extensive experience of the Facilities and the Institute to guide and private services to public and private clients, in their development projects, in the fields of bioengineering, BioMEMS, materials science, tissue engineering and microfluidics.
Services
Access to 10,000 class clean room, specialized in the Microfabrication and characterization of biomedical devices.
Training in Microfabrication and Characterization techniques, equipment, and processes for autonomous use (self-user mode).
Customized Microfabrication and Characterization Services, led by scientific staff (order mode with previous quotation).
Microfabrication:
- Custom design and fabrication of microfluidic masters, and other applications, based optical lithography with SU-8 (Down to 1μm lateral resolution)
- Custom design and fabrication of microfluidic masters, and other applications, based on 3D printing (Down to 100μm lateral resolution)
- Design and fabrication of microelectrodes, and other microelectronics’ structuresDesign and fabrication of high-resolution nanostructures, by electron beam lithography (Down to 100nm lateral resolution)
- Fabrication of microfluidic chips based on PDMS
- Design and fabrication of Cr photomasks for photolithographic processes (Down to 1μm lateral resolution)
Characterization:
- Surface topographic analysis using optical interferometry and mechanical profilometry
- Optical characterization of samples by bright and dark field optical microscopy
- Measurements of the contact angle for the wettability properties of the surface
- Morphological characterization by electron microscopy SEM
Equipment
Microfabrication:
- 3D DLP Reify printer, Solus (broadband technology from 350nm to 750nm approximately)
- 3D DLP Microlay printer, Versus 385 (385nm LED technology)
- Süss UV photolithography mask aligner, MJB4 (broadband technology from 260nm to 460nm approximately)
- Kloé UV photolithography mask aligner, KUB3 (365nm LED technology)
- Heidelberg Direct Writting Laser Lithography system, DWL66 (410nm laser technology)
- Reith electron lithography system, Elphy Plus VII
- Quimipol Chemical BathsEvaporator and Sputtering Leybold, Univex 450B
- Harrick Oxygen Plasma Generator, PDC-002-CE
- Spin Coaters Laurel, WS400A-6TFM and WS-650Sz
- PSelecta oven, Conterm 19L
- Heating plates PSelecta, Plactronic
- Customized puncher
Characterization:
- Dataphysics contact angle, OCA 15Pro
- Veeco interferometer, Wyko NT1100
- Olympus optical microscope, X51RF
- Bruker Profilometer, DektakXT
- Olympus stereo microscope, SZX10
- Nikon optical microscope, Eclipse L150
Additional characterization services are available at the Microscopy Characterization facility.
Staff
Dra. Maria Teresa Galán Cascales | tgalan@ibecbarcelona.eu
| +34 934 037 138 | ORCID
Marina Lantarón | microfab@ibecbarcelona.eu
Marta Casas | microfab@ibecbarcelona.eu
Emma Oriol | microfab@ibecbarcelona.eu
